Publications
X Author: Ming-Shan Jeng
2004
Xu, Tengfang T., and Ming-Shan Jeng."Laboratory Evaluation of Fan-Filter Units Aerodynamic and Energy Performance."Journal of the Illuminating Engineering Society
47.1 (2004) 5. DOI
Jeng, Ming-Shan, Tengfang T. Xu, and Chao-Ho Lan."Towards Green Systems for Cleanrooms: Energy-Efficient Fan Filter Units."SEMI Technology Symposium: Innovations in Semiconductor Manufacturing
(2004) 73-77.