Skip to main content
  • Berkeley Lab(link is external)
  • Energy Technologies Area(link is external)
Home
  • Join
  • About +
    • FAQs
    • Team Members
    • Partners
    • Participants
  • Resources +
    • Guidance Documents
    • Case Studies
    • Webinars
    • External Resources

Error message

There was a problem getting your available contact lists.

Impact of Growth Temperature, Pressure and Strain on the Morphology of GaN Films

Publication Type

Conference Proceedings

Authors

Fujii, Hiroaki, Christian F. Kisielowski, Joachim Krüger, Michael S.H. Leung, Ralf Klockenbrink, Michael D. Rubin, Eicke R. Weber, Joachim Krüger

DOI

10.1557/PROC-449-227(link is external)

Abstract

GaN films grown on sapphire at different temperatures are investigated. A Volmer-Weber growth mode is observed at temperatures below 1000K that leads to thin films composed of oriented grains with finite size. Their size is temperature dependent and can actively be influenced by strain. Largest grains are observed in compressed films. It is argued that diffusing Ga ad-atoms dominate the observed effects with an activation energy of 2.3 ± 0.5 eV. Comparably large grain sizes are observed in films grown on off-axes sapphire substrates and on bulk GaN. This assures that the observed size limitation is a consequence of the 3D growth mode and not dependent on the choice of the substrate. In addition, the grain size and the surface roughness of the films depend on the nitrogen partial pressure in the molecular beam epitaxy (MBE) chamber,most likely due to collisions between the reactive species and the background gas molecules. This effect is utilized to grow improved nucleation layers on sapphire.

Journal

Materials Research Society Symposium N – III-V Nitrides

Volume

449

Year of Publication

1996

Organization

Building Technology and Urban Systems Division, Building Technologies Department, Windows and Envelope Materials

Research Areas

Building Façade Solutions, Advanced Coatings, Windows and Daylighting, W and D: Dynamic Glazings and Advanced Coatings, BTUS Windows and Daylighting

Related Files

PDF (767.44 KB) (link is external)

        

©2025 Energy Technologies Area, Berkeley Lab
Lawrence Berkeley National Laboratory (link is external)
  • twitter(link is external)
  • instagram(link is external)
  • LinkedIn(link is external)
  • facebook(link is external)
  • youtube(link is external)
  • DOE logo
  • UC logo
A U.S. Department of Energy National Laboratory Managed by the University of California
Questions & Comments(link is external) Privacy & Security Notice(link is external)