Evaluation of imprint in fully integrated (La,Sr)CoO3/Pb(Nb,Zr,Ti)O3/(La,Sr)CoO3 ferroelectric capacitors
Publication Type
Journal Article
Authors
Sadashivan, S., S. Aggarwal, T.K. Song, Ramamoorthy Ramesh, J.T. Jr., B.A. Tuttle, W.L. Warren, D. Dimos
DOI
Abstract
We have investigated the imprint characteristics of fully integrated ferroelectric lead zirconate titanate based capacitors. These capacitors were fabricated using conducting perovskite La-Sr-Co-O electrodes. We have specifically focused on the effect of several test and capacitor variables, including temperature, unipolar stress amplitude, number of cycles, and device area. Two different figures of merit, one based on coercive voltage changes and the other based on differences in polarization values were used to quantify imprint. The imprint in our capacitors showed a small temperature dependence over the range that we have studied. The unidirectional pulse voltage amplitude had a larger influence on the imprint. © 1998 American Institute of Physics.
Journal
Journal of Applied Physics
Volume
83
Year of Publication
1998
ISSN
00218979
Notes
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